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  1. 佐藤,功 (サトウ,イサオ)
    2. https://www.lib.hokudai.ac.jp/dissertations/list/?FF=4&LANG=en&ACCN=1203605715
    Title in Japanese化学増幅型レジストを用いた極微細パターン形成に関する研究
    Title in English
    Year of conferral of degrees2000
    Type of degree / Kind of academic degree2（論文博士） / 036（博士(工学)）
    Report number5715
    Date of conferral of degrees2000-12-25
    The primary examiner / A deputy examiner嶋田,志郎 / 小平,紘平　宮浦,憲夫　牧野,英司
    Location
    Call number
    Comment
    Summary5715_sato.pdf