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  1. 蘇,淳烈 (ソ,シュンヨル)
    2. https://www.lib.hokudai.ac.jp/dissertations/list/?FF=4&LANG=en&ACCN=0000258923
    Title in Japanese四フッ化炭素(CF4)RFプラズマのモデリング - 定常状態と過渡応答 -
    Title in EnglishModeling of Carbon Tetrafluoride(CF4)RF Plasma -Steady State and Transient Response-
    Year of conferral of degrees2002
    Type of degree / Kind of academic degree1（課程博士） / 036（博士(工学)）
    Report number6373
    Date of conferral of degrees2003-03-25
    The primary examiner / A deputy examiner酒井,洋輔 / 雨宮,好仁　本間,利久　菅原,広剛
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    Summary6373_so.pdf