北海道大学学位論文目録データベース 検索結果
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- 鴨志田,和良 (カモシダ,カズヨシ) https://www.lib.hokudai.ac.jp/dissertations/list/?FF=4&LANG=en&ACCN=1203605459
| Title in Japanese | スパッタ法による超LSI多層配線用AI系合金薄膜の形成技術に関する研究 |
| Title in English | |
| Year of conferral of degrees | 1998 |
| Type of degree / Kind of academic degree | 2(論文博士) / 036(博士(工学)) |
| Report number | 5459 |
| Date of conferral of degrees | 1999-03-25 |
| The primary examiner / A deputy examiner | 雨宮,好仁 / 長谷川,英機 武笠,幸一 酒井,洋輔 |
| Location | |
| Call number | |
| Comment | |
| Summary | 5459_kamoshida.pdf |
