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- 鴨志田,和良 (カモシダ,カズヨシ) https://www.lib.hokudai.ac.jp/dissertations/list/?FF=4&LANG=en&ACCN=1203605459
Title in Japanese | スパッタ法による超LSI多層配線用AI系合金薄膜の形成技術に関する研究 |
Title in English | |
Year of conferral of degrees | 1998 |
Type of degree / Kind of academic degree | 2(論文博士) / 036(博士(工学)) |
Report number | 5459 |
Date of conferral of degrees | 1999-03-25 |
The primary examiner / A deputy examiner | 雨宮,好仁 / 長谷川,英機 武笠,幸一 酒井,洋輔 |
Location | |
Call number | |
Comment | |
Summary | 5459_kamoshida.pdf |