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  1. 鴨志田,和良 (カモシダ,カズヨシ)
    2. https://www.lib.hokudai.ac.jp/dissertations/list/?FF=4&LANG=en&ACCN=1203605459
    Title in Japaneseスパッタ法による超LSI多層配線用AI系合金薄膜の形成技術に関する研究
    Title in English
    Year of conferral of degrees1998
    Type of degree / Kind of academic degree2（論文博士） / 036（博士(工学)）
    Report number5459
    Date of conferral of degrees1999-03-25
    The primary examiner / A deputy examiner雨宮,好仁 / 長谷川,英機　武笠,幸一　酒井,洋輔
    Location
    Call number
    Comment
    Summary5459_kamoshida.pdf