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  1. 楊,靖 (ヨウ,セイ)
    2. https://www.lib.hokudai.ac.jp/dissertations/list/?FF=4&LANG=en&ACCN=1103604766
    Title in JapaneseAr、SiH4ガスRF非平衡プラズマの過渡応答解析
    Title in English
    Year of conferral of degrees1998
    Type of degree / Kind of academic degree1（課程博士） / 036（博士(工学)）
    Report number4766
    Date of conferral of degrees1999-03-25
    The primary examiner / A deputy examiner酒井,洋輔 / 長谷川,英機　本間,利久　榎戸,武揚
    Location
    Call number
    Comment
    Summary4766_you.pdf