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- 楊,靖 (ヨウ,セイ) https://www.lib.hokudai.ac.jp/dissertations/list/?FF=4&LANG=en&ACCN=1103604766
Title in Japanese | Ar、SiH4ガスRF非平衡プラズマの過渡応答解析 |
Title in English | |
Year of conferral of degrees | 1998 |
Type of degree / Kind of academic degree | 1(課程博士) / 036(博士(工学)) |
Report number | 4766 |
Date of conferral of degrees | 1999-03-25 |
The primary examiner / A deputy examiner | 酒井,洋輔 / 長谷川,英機 本間,利久 榎戸,武揚 |
Location | |
Call number | |
Comment | |
Summary | 4766_you.pdf |