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  1. 小野,俊郎 (オノ,トシロウ)
    2. https://www.lib.hokudai.ac.jp/dissertations/list/?FF=4&LANG=en&ACCN=1201603194
    Title in JapaneseX線露光用マスク製作法の研究
    Title in English
    Year of conferral of degrees1986
    Type of degree / Kind of academic degree2（論文博士） / 016（工学博士）
    Report number3194
    Date of conferral of degrees1987-03-25
    The primary examiner / A deputy examiner佐藤,敏一 / 斉藤,勝政　長谷川,英機　勇田,敏夫
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