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- 前田,正彦 (マエダ,マサヒコ) https://www.lib.hokudai.ac.jp/dissertations/list/?FF=4&LANG=en&ACCN=1201603076
Title in Japanese | CVD法およびプラズマCVD法によるSi系絶縁薄膜形成法の研究 |
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Year of conferral of degrees | 1986 |
Type of degree / Kind of academic degree | 2(論文博士) / 016(工学博士) |
Report number | 3076 |
Date of conferral of degrees | 1986-09-30 |
The primary examiner / A deputy examiner | 長谷川,英機 / 田頭,博昭 小川,吉彦 佐藤,敏一 松本,伍良 |
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